Chapter 83. Microstructureand Properties of W-Cr-N Composite Films Produced Byubm Sputtering Method

  1. Waltraud M. Kriven and
  2. Hua-Tay Lin
  1. Kiyoyuki Kawai and
  2. Masahiro Oguchi

Published Online: 27 MAR 2008

DOI: 10.1002/9780470294802.ch83

27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3

27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3

How to Cite

Kawai, K. and Oguchi, M. (2003) Microstructureand Properties of W-Cr-N Composite Films Produced Byubm Sputtering Method, in 27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3 (eds W. M. Kriven and H.-T. Lin), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294802.ch83

Author Information

  1. TEKOKU PISTON RING CO, LTD. 1-13 2-Chome Shinmekho Okaya-shi NAGANO 394-8511 JAPAN

Publication History

  1. Published Online: 27 MAR 2008
  2. Published Print: 1 JAN 2003

ISBN Information

Print ISBN: 9780470375839

Online ISBN: 9780470294802

SEARCH

Keywords:

  • diamond like carbon;
  • high abrasion resistance;
  • silicon wafer transport;
  • plasma chemical vapor deposition;
  • turbo molecular pump

Summary

W-Cr-N composite films were deposited by the UBM (Unbalanced Magnetron) sputtering method and their crystalline structure, mioostructure, hardness, and wear resistance were investigated. in order to obtain the multilayer structure, W arid Cr targets were used independently with a rotary workrable. Multilayer structures consisting of W-N layers and Cr-N layers (W-N/Cr-N) were observed. However, individual layer thickness was not uniform. Their crystalline structures changed gradually from boc W, to the mixed phase of W and foo nitride (mainly CrN), then to foo nitride (W2N + CrN), as N2 flow rate was increased. The hardness of W/CiNmultilayer film was the highest, while that of W2N/CrN was the lowest. It is thought that this phenomenon is caused by interface coherency of W-N layers and Cr-N layers. Though the hardness was the lowest, W2N/CrN showed the best wear resistance. On the other hand, wear resistance of W/Cr was inferior to that of W single layer firms. in addition, the effect of the layered period on the hardness was evaluated. The hardness was not increased significantly by modulating the layered pericri from 20 nm to 4 nm.