Chapter 84. Properties of Flexible Dlc Film Deposited by Amplitude-Modulated Rf P-Cvd

  1. Waltraud M. Kriven and
  2. Hua-Tay Lin
  1. Takahiro Nakahigashi,
  2. Koji Miyake and
  3. Hisanori Oohara

Published Online: 27 MAR 2008

DOI: 10.1002/9780470294802.ch84

27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3

27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3

How to Cite

Nakahigashi, T., Miyake, K. and Oohara, H. (2003) Properties of Flexible Dlc Film Deposited by Amplitude-Modulated Rf P-Cvd, in 27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3 (eds W. M. Kriven and H.-T. Lin), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294802.ch84

Author Information

  1. Nippon ITF Inc., 575 Kuze Tonoshiro-cyo, Minami-ku, Kyoto 601-8205 Japan

Publication History

  1. Published Online: 27 MAR 2008
  2. Published Print: 1 JAN 2003

ISBN Information

Print ISBN: 9780470375839

Online ISBN: 9780470294802

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Keywords:

  • metal-oxide layer-composites;
  • morphology;
  • glass-ceramic substrates;
  • thermally sprayed coatings;
  • cylindrical electrodes

Summary

We have proceeded to coating to the polymer materials such as rubber and resin while making the best use of the features of DLC films.