Chapter 18. Mechanical and Electrical Properties of Al2O3 Thin Films on Metals, Ceramics and Resins Prepared by Aerosol Deposition Method

  1. Waltraud M. Kriven and
  2. Hua-Tay Lin
  1. Kazuya Tsujimichi1,
  2. Katsuhiko Mori1,
  3. Atsushi Yoshida1,
  4. Junichi Iwasawa1,
  5. Hironori Hatono1,
  6. Masakatsu Kiyohara1,
  7. Maxim Lebedev2 and
  8. Jun Akedo2

Published Online: 26 MAR 2008

DOI: 10.1002/9780470294826.ch18

27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: B: Ceramic Engineering and Science Proceedings, Volume 24, Issue 4

27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: B: Ceramic Engineering and Science Proceedings, Volume 24, Issue 4

How to Cite

Tsujimichi, K., Mori, K., Yoshida, A., Iwasawa, J., Hatono, H., Kiyohara, M., Lebedev, M. and Akedo, J. (2003) Mechanical and Electrical Properties of Al2O3 Thin Films on Metals, Ceramics and Resins Prepared by Aerosol Deposition Method, in 27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: B: Ceramic Engineering and Science Proceedings, Volume 24, Issue 4 (eds W. M. Kriven and H.-T. Lin), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294826.ch18

Author Information

  1. 1

    TOTO LTD 2-8-1 Honson, Chigasaki, Kanagawa 253-8577, Japan

  2. 2

    National Institute of Advanced Industrial Science and Technology, AIST 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 2003

ISBN Information

Print ISBN: 9780470375846

Online ISBN: 9780470294826

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Keywords:

  • thin films;
  • aerosol deposition method;
  • dielectric breakdown;
  • soda-lime glass;
  • aluminum oxide

Summary

Large sized Al2O3 thin films with over 10 μ thickness were fabricated by aerosol deposition method (ADM) on various substrates without substrate heating. Vickers hardness and dielectric breakdown voltage of the films on metal substrates exceeded 1400 Hv and 150 V/μm, respectively. Flow velocity of the Al2O3 particles was found to have an influence on the hardness of the films. It was also possible to fabricate Al2O3 films on soda-lime glass and resin substrates.