Chapter 47. Laser Vapor Phase Synthesis of Submicron Silicon and Silicon Nitride Powders from Halogenated Silanes
- John B. Wachtman Jr.
Published Online: 28 MAR 2008
Copyright © 1988 The American Ceramic Society, Inc.
Proceedings of the 12th Annual Conference on Composites and Advanced Ceramic Materials, Part 1 of 2: Ceramic Engineering and Science Proceedings, Volume 9, Issue 7/8
How to Cite
Bauer, R. A., Smulders, R., Geus, E. R., Van Der Put, P. J., Becht, J. G. M. and Schoonman, J. (1988) Laser Vapor Phase Synthesis of Submicron Silicon and Silicon Nitride Powders from Halogenated Silanes, in Proceedings of the 12th Annual Conference on Composites and Advanced Ceramic Materials, Part 1 of 2: Ceramic Engineering and Science Proceedings, Volume 9, Issue 7/8 (ed J. B. Wachtman), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470310496.ch47
- Published Online: 28 MAR 2008
- Published Print: 1 JAN 1988
Print ISBN: 9780470374801
Online ISBN: 9780470310496
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