Chapter 2. Vapor Deposition of Crystalline Diamond
- John B. Wachtman Jr
Published Online: 26 MAR 2008
Copyright © 1988 The American Ceramics Society, Inc.
12th Annual Conference on Composites and Advanced Ceramic Materials, Part 2 of 2: Ceramic Engineering and Science Proceedings, Volume 9, Issue 9/10
How to Cite
Spear, K. E., Frenklach, M., Badzian, A., Badzian, T. and Messier, R. (1988) Vapor Deposition of Crystalline Diamond, in 12th Annual Conference on Composites and Advanced Ceramic Materials, Part 2 of 2: Ceramic Engineering and Science Proceedings, Volume 9, Issue 9/10 (ed J. B. Wachtman), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470310502.ch2
- Published Online: 26 MAR 2008
- Published Print: 1 JAN 1988
Print ISBN: 9780470374818
Online ISBN: 9780470310502
- atmospheric pressures;
- hydrogen-hydrocarbon mixtures;
Crystalline diamond coatings can now be vapor deposited from hydrogen-hydrocarbon mixtures at less than atmospheric pressures and temperatures of about 800°-1000°C by using activated gases. This paper briefly reviews results from our studies of microwave plasma assisted vapor deposition and mechanistic hypotheses explaining why the growth of diamond occurs rather than graphite.