Chapter 37. Fabrication of SiC Matrix Surface Composites by Chemical Vapor Infiltration with Microwave Heating: Temperature Effects

  1. John B. Wachtman Jr.
  1. Paul S. Day,
  2. Daniel J. Skamser,
  3. Hamlin M. Jennings and
  4. D. Lynn Johnson

Published Online: 28 MAR 2008

DOI: 10.1002/9780470314555.ch37

Proceedings of the 18th Annual Conference on Composites and Advanced Ceramic Materials - B: Ceramic Engineering and Science Proceedings, Volume 15, Issue 5

Proceedings of the 18th Annual Conference on Composites and Advanced Ceramic Materials - B: Ceramic Engineering and Science Proceedings, Volume 15, Issue 5

How to Cite

Day, P. S., Skamser, D. J., Jennings, H. M. and Johnson, D. L. (2008) Fabrication of SiC Matrix Surface Composites by Chemical Vapor Infiltration with Microwave Heating: Temperature Effects, in Proceedings of the 18th Annual Conference on Composites and Advanced Ceramic Materials - B: Ceramic Engineering and Science Proceedings, Volume 15, Issue 5 (ed J. B. Wachtman), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470314555.ch37

Author Information

  1. Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208. Mark S. Spotz, Illinois Superconductor Corp., Evanston, IL 60201

Publication History

  1. Published Online: 28 MAR 2008
  2. Published Print: 1 JAN 1994

ISBN Information

Print ISBN: 9780470375334

Online ISBN: 9780470314555

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Keywords:

  • ceramic composite;
  • thermal gradient;
  • si bearing precursor;
  • planar substrate;
  • surface composite

Summary

Ceramic composites with SiC matrices have been fabricated by microwave-assisted chemical vapor infiltration (MCVI). Preforms consisted of Nicalon fiber tows wound around SiC cylinders. CHM3SiCl3 (MTS) and H2 were used as the gaseous reactants for infiltration in an isobaric environment maintained at 73 kPa. The specimens were heated with 2.45 GHz microwave radiation in a single mode cavity operating in a perturbed TE112 mode. The rate of infiltration of the preform with SiC was found to be a strong function of the flow rate and the concentration of MTS. The effect of temperature was found to be small. The weak temperature dependence is discussed in terms of the non-Arrhenius kinetic behavior of SiC deposition and the reduction in thermal gradients caused by deposition of a matrix material with a low penetration depth of microwave energy.