Chapter 48. Control of Thin Film Processing Behavior Through Precursor Structural Modifications

  1. John B. Wachtman Jr.
  1. R. W. Schwartz,
  2. J. A. Voigt,
  3. T. J. Boyle,
  4. T. A. Christenson and
  5. C. D. Buchheit

Published Online: 26 MAR 2008

DOI: 10.1002/9780470314784.ch48

Proceedings of the 19th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures - B: Ceramic Engineering and Science Proceedings, Volume 16, Issue 5

Proceedings of the 19th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures - B: Ceramic Engineering and Science Proceedings, Volume 16, Issue 5

How to Cite

Schwartz, R. W., Voigt, J. A., Boyle, T. J., Christenson, T. A. and Buchheit, C. D. (1995) Control of Thin Film Processing Behavior Through Precursor Structural Modifications, in Proceedings of the 19th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures - B: Ceramic Engineering and Science Proceedings, Volume 16, Issue 5 (ed J. B. Wachtman), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470314784.ch48

Author Information

  1. Sandia National Laboratories The Advanced Materials Laboratory 1001 University Blvd. SE, Suite 100 Albuquerque, NM 87106

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 1995

ISBN Information

Print ISBN: 9780470375389

Online ISBN: 9780470314784

SEARCH

Keywords:

  • segregation;
  • ingredients;
  • modernization;
  • diameter;
  • fluctuating

Summary

In the sol-gel processing of ceramic thin films it has been frequently noted that the processing behavior, microstructure and properties of the films are dependent on the nature of the coating solution. In an attempt to understand such processing-property relationships, we have systematically investigated the effects of precursor nature on thin film densification and crystallization for ZrO2 and TiO2 thin films.