Chapter 4. Oxynitride Glasses and Silicon Nitride Processing

  1. William Smothers
  1. R. E. Loehman

Published Online: 26 MAR 2008

DOI: 10.1002/9780470318140.ch4

A Collection of Papers Presented at the 1981 New England Section Topical Meeting on Nonoxide Ceramics: Ceramic Engineering and Science Proceedings, Volume 3, No. 1/2

A Collection of Papers Presented at the 1981 New England Section Topical Meeting on Nonoxide Ceramics: Ceramic Engineering and Science Proceedings, Volume 3, No. 1/2

How to Cite

Loehman, R. E. (1982) Oxynitride Glasses and Silicon Nitride Processing, in A Collection of Papers Presented at the 1981 New England Section Topical Meeting on Nonoxide Ceramics: Ceramic Engineering and Science Proceedings, Volume 3, No. 1/2 (ed W. Smothers), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470318140.ch4

Author Information

  1. SRI International Menlo Park, CA 94025

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 1982

ISBN Information

Print ISBN: 9780470373934

Online ISBN: 9780470318140

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Keywords:

  • amorphous;
  • oxynitride;
  • nitrogen;
  • atmosphere;
  • equilibrium

Summary

Processing Si3N4 ceramics using reactive additives produces intergranuiar phases that may be similar in composition to bulk oxynitride glasses. Understanding the behavior of those glasses provides insight into Si3N4 processing. For example, glass composition data provide estimates of Si3N4 solubility in ceramic intergranuiar phases and allow one to predict whether those phases will be amorphous or crystalline. Oxynitride glass data are presented for the systems Y-Si-Al-O-N and Mg-Si-Al-O-N that are particularly relevant to Si3N4 ceramics. Sintering studies have been conducted using additive compositions designed to give particular glass phases at the grain boundaries.