Chapter 9. The Use of Silicon Nitride in Semiconductor Devices

  1. William Smothers
  1. C. A. Goodwin

Published Online: 26 MAR 2008

DOI: 10.1002/9780470318140.ch9

A Collection of Papers Presented at the 1981 New England Section Topical Meeting on Nonoxide Ceramics: Ceramic Engineering and Science Proceedings, Volume 3, No. 1/2

A Collection of Papers Presented at the 1981 New England Section Topical Meeting on Nonoxide Ceramics: Ceramic Engineering and Science Proceedings, Volume 3, No. 1/2

How to Cite

Goodwin, C. A. (1982) The Use of Silicon Nitride in Semiconductor Devices, in A Collection of Papers Presented at the 1981 New England Section Topical Meeting on Nonoxide Ceramics: Ceramic Engineering and Science Proceedings, Volume 3, No. 1/2 (ed W. Smothers), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470318140.ch9

Author Information

  1. Bell Telephone Labs Reading, Pa. 19603

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 1982

ISBN Information

Print ISBN: 9780470373934

Online ISBN: 9780470318140

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Keywords:

  • semiconductor;
  • electronics;
  • configuration;
  • hydrogen;
  • nitride

Summary

This chapter contains sections titled:

  • Si3N4

  • SiN

  • Summary

  • Acknowledgements