Chapter 5. Silicon, Germanium and Silicon-Germanium Liquid Phase Epitaxy

  1. Peter Capper1 and
  2. Michael Mauk2
  1. Michael G. Mauk

Published Online: 4 SEP 2007

DOI: 10.1002/9780470319505.ch5

Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials

Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials

How to Cite

Mauk, M. G. (2007) Silicon, Germanium and Silicon-Germanium Liquid Phase Epitaxy, in Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials (eds P. Capper and M. Mauk), John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/9780470319505.ch5

Editor Information

  1. 1

    SELEX Sensors and Airborne Systems Infra-Red Limited, PO Box 217, Millbrook, Southampton, SO15 0EG, UK

  2. 2

    School of Engineering and Applied Science, University of Pennsylvania, Philadelphia, PA 19101, USA

Author Information

  1. School of Engineering and Applied Science, University of Pennsylvania, Philadelphia, PA 19101, USA

Publication History

  1. Published Online: 4 SEP 2007
  2. Published Print: 13 JUL 2007

ISBN Information

Print ISBN: 9780470852903

Online ISBN: 9780470319505

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Keywords:

  • liquid phase epitaxy (LPE) application;
  • LPE to silicon- and germanium-based semiconductor devices;
  • light emitting diodes (LEDs);
  • silicon-metal binary phase diagram;
  • steady-state continuous- or semi-continuous mode processes;
  • fine-grained silicon source;
  • LPE and solution growth;
  • silicon LPE on monocrystalline and multicrystalline silicon wafers

Summary

This chapter contains sections titled:

  • Introduction and scope of review

  • Historical perspective

  • Basis of silicon and germanium LPE

  • Silicon LPE methods

  • Solvent selection

  • Low-temperature silicon LPE

  • Purification of silicon for solar cells in an LPE process

  • Electrical properties of LPE-grown silicon

  • LPE of Si- and Ge-based alloys

  • Selective LPE and liquid phase ELO

  • Solar cells

  • Other applications of silicon and germanium LPE

  • Conclusions and outlook

  • References

  • Appendix 1. Phase equilibria modeling: The silicon-metal liquidus

  • Appendix 2. Impurities and doping in silicon LPE

  • Appendix 3. Effects of oxygen and water vapor in Si LPE