Chapter 3. Silicon Resonant Microsensors
- William Smothers
Published Online: 27 MAR 2008
Copyright © 1987 The American Ceramic Society, Inc.
14th Automotive Materials Conference: Ceramic Engineering and Science Proceedings, Volume 8, Issue 9/10
How to Cite
Schmidt, M. A. and Howe, R. T. (1987) Silicon Resonant Microsensors, in 14th Automotive Materials Conference: Ceramic Engineering and Science Proceedings, Volume 8, Issue 9/10 (ed W. Smothers), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470320419.ch3
- Published Online: 27 MAR 2008
- Published Print: 1 JAN 1987
Print ISBN: 9780470374740
Online ISBN: 9780470320419
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