Chapter 3. Silicon Resonant Microsensors
- William Smothers
Published Online: 27 MAR 2008
Copyright © 1987 The American Ceramic Society, Inc.
14th Automotive Materials Conference: Ceramic Engineering and Science Proceedings, Volume 8, Issue 9/10
How to Cite
Schmidt, M. A. and Howe, R. T. (1987) Silicon Resonant Microsensors, in 14th Automotive Materials Conference: Ceramic Engineering and Science Proceedings, Volume 8, Issue 9/10 (ed W. Smothers), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470320419.ch3
- Published Online: 27 MAR 2008
- Published Print: 1 JAN 1987
Print ISBN: 9780470374740
Online ISBN: 9780470320419
Mechanically resonant structures are sensitive transducers of signals that alter the kinetic or potential energy of vibration. This paper reviews the design issues for this class of sensor and evaluates the potential for silicon resonant microsensors fabricated using planar microfabrication technology. We first apply Rayleigh's Energy Method to determine the resonant frequencies of selected microstructures. Insight into resonant sensor design is gained through perturbing the expressions for kinetic or potential energy, making Rayleigh's Method an important design tool. We apply this technique to compare the sensitivities of surface-acoustic-wave and resonant microbridge vapor sensors and to evaluate the resonant diaphragm and axially loaded vibrating beam structures for force or pressure sensing. Finally, the challenges for developing a silicon resonant microsensor technology are outlined, including questions of excitation and detection, material properties, fabrication and structural constraints, and packaging.