Chapter 9. Tin Oxide Gas Sensing Microsensors from Metallo-Organic Deposited (MOD) Thin Films

  1. William Smothers
  1. Adolph L. Micheli,
  2. Shih-Chia Chang and
  3. David B. Hicks

Published Online: 27 MAR 2008

DOI: 10.1002/9780470320419.ch9

14th Automotive Materials Conference: Ceramic Engineering and Science Proceedings, Volume 8, Issue 9/10

14th Automotive Materials Conference: Ceramic Engineering and Science Proceedings, Volume 8, Issue 9/10

How to Cite

Micheli, A. L., Chang, S.-C. and Hicks, D. B. (1987) Tin Oxide Gas Sensing Microsensors from Metallo-Organic Deposited (MOD) Thin Films, in 14th Automotive Materials Conference: Ceramic Engineering and Science Proceedings, Volume 8, Issue 9/10 (ed W. Smothers), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470320419.ch9

Author Information

  1. Electronics Dept. General Motors Research Labs Warren, MI 48090–9055

Publication History

  1. Published Online: 27 MAR 2008
  2. Published Print: 1 JAN 1987

ISBN Information

Print ISBN: 9780470374740

Online ISBN: 9780470320419

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Keywords:

  • equipment;
  • photolithographic;
  • electromigration;
  • photoresist;
  • nonstoichiometry

Summary

Semiconductor gas sensors generally lack high selectivity and reliability. Experimental methods for resolving these problems have been through sensor material modifications. A new process for making oxide thin films by metallo-organic deposition (MOD) provides a versatile and convenient way for material modification. In addition, it is compatible with microelectronic processes. Tin oxide films (SnOx) with various additives were prepared by spinning metallo-organic inks on silicon wafers. The sensitivity of the samples to a reducing gas was depressed by donor type additives and enhanced by an acceptor type additive. Tin oxide-based microsensors prepared by MOD were fabricated on thin silicon membranes (∽2 μm thick) with integrated polysilicon heaters. The completed microsensors showed good response to alcohol vapor.