7. Cerium Oxide Thin Films via Ion Assisted Electron Beam Deposition

  1. Hua-Tay Lin and
  2. Dongming Zhu
  1. V. Dansoh1,
  2. F. Gertz1,
  3. J. Gump1,
  4. A. Johnson1,
  5. J. I. Jung1,
  6. M. Klingensmith1,
  7. Y. Liu1,
  8. Y. D. Liu1,
  9. J. T. Oxaal1,
  10. C. J. Wang1,
  11. G. Wynick1,
  12. D. Edwards1,
  13. J. H. Fan1,
  14. X. W. Wang1,
  15. P. J. Bush2 and
  16. A. Fuchser3

Published Online: 8 APR 2009

DOI: 10.1002/9780470456323.ch7

Advanced Ceramic Coatings and Interfaces III: Ceramic Engineeing and Science Proceedings, Volume 29, Issue 4

Advanced Ceramic Coatings and Interfaces III: Ceramic Engineeing and Science Proceedings, Volume 29, Issue 4

How to Cite

Dansoh, V., Gertz, F., Gump, J., Johnson, A., Jung, J. I., Klingensmith, M., Liu, Y., Liu, Y. D., Oxaal, J. T., Wang, C. J., Wynick, G., Edwards, D., Fan, J. H., Wang, X. W., Bush, P. J. and Fuchser, A. (2008) Cerium Oxide Thin Films via Ion Assisted Electron Beam Deposition, in Advanced Ceramic Coatings and Interfaces III: Ceramic Engineeing and Science Proceedings, Volume 29, Issue 4 (eds H.-T. Lin and D. Zhu), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470456323.ch7

Author Information

  1. 1

    School of Engineering, Alfred University, Alfred, NY, USA

  2. 2

    School of Dental Medicine, SUNY, Buffalo, NY, USA

  3. 3

    J. A. Woollam Co. Inc., Lincoln, NE, USA

Publication History

  1. Published Online: 8 APR 2009
  2. Published Print: 8 DEC 2008

Book Series:

  1. Ceramic Engineering and Science Proceedings

Book Series Editors:

  1. Tatsuki Ohji and
  2. Andrew Wereszczak

ISBN Information

Print ISBN: 9780470344958

Online ISBN: 9780470456323

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Keywords:

  • cerium oxide thin films;
  • electron beam deposition;
  • X-ray diffraction;
  • scanning electron microscopy;
  • Raman image spectroscopy

Summary

This chapter contains sections titled:

  • Abstract

  • Introduction

  • Thin Film Fabrication

  • Equipment Utilized to Characterize Thin Films

  • Experimental Results

  • Conclusion/Discussion

  • Acknowledgment

  • References