Surface Analysis of Nano-Structured Carbon Nitride Films for Microsensors

  1. K. M. Nair,
  2. D. Suvorov,
  3. R. W. Schwartz and
  4. R. Guo
  1. Choong W. Chang1,
  2. Ju N. Kim1,
  3. Yoen H. Jeong1,
  4. Young J. Seo1,
  5. S. Chowdhury2 and
  6. Sung P. Lee1

Published Online: 22 JUL 2009

DOI: 10.1002/9780470528990.ch10

Advances in Electroceramic Materials: Ceramic Transactions

Advances in Electroceramic Materials: Ceramic Transactions

How to Cite

Chang, C. W., Kim, J. N., Jeong, Y. H., Seo, Y. J., Chowdhury, S. and Lee, S. P. (2009) Surface Analysis of Nano-Structured Carbon Nitride Films for Microsensors, in Advances in Electroceramic Materials: Ceramic Transactions (eds K. M. Nair, D. Suvorov, R. W. Schwartz and R. Guo), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470528990.ch10

Author Information

  1. 1

    Department of Electronic Engineering, Kyungnam University, Masan, Korea

  2. 2

    Intel Corporation, Hilsboro, OR 97124, USA

Publication History

  1. Published Online: 22 JUL 2009
  2. Published Print: 8 JUN 2009

ISBN Information

Print ISBN: 9780470408445

Online ISBN: 9780470528990

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Keywords:

  • carbon nitride films;
  • microsensors;
  • surface analysis;
  • interdigitated electrodes;
  • diamond

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental

  • Results and Discussion

  • Conclusion

  • Acknowledgment