Effect of Rare Earth Elements Doping on the Electrical Properties of (Ba,Sr)TiO3 Thin Film Capacitors

  1. K. M. Nair,
  2. D. Suvorov,
  3. R. W. Schwartz and
  4. R. Guo
  1. N. Kamehara1 and
  2. K. Kurihara2

Published Online: 22 JUL 2009

DOI: 10.1002/9780470528990.ch3

Advances in Electroceramic Materials: Ceramic Transactions

Advances in Electroceramic Materials: Ceramic Transactions

How to Cite

Kamehara, N. and Kurihara, K. (2009) Effect of Rare Earth Elements Doping on the Electrical Properties of (Ba,Sr)TiO3 Thin Film Capacitors, in Advances in Electroceramic Materials: Ceramic Transactions (eds K. M. Nair, D. Suvorov, R. W. Schwartz and R. Guo), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470528990.ch3

Author Information

  1. 1

    Fujitsu Quality Laboratory LTD., Kawasaki, Kanagawa, Japan

  2. 2

    Fujitsu Laboratories LTD., Atsugi, Kanagawa, Japan

Publication History

  1. Published Online: 22 JUL 2009
  2. Published Print: 8 JUN 2009

ISBN Information

Print ISBN: 9780470408445

Online ISBN: 9780470528990

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Keywords:

  • rare earth elements;
  • barium strontium titanate;
  • thin film capacitors;
  • RF magnetron sputtering;
  • leakage currents

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental

  • Results and Discussion

  • Conclusion