3. Diamond Tools in Micromachining

  1. J. Paulo Davim and
  2. Mark J. Jackson
  1. Waqar Ahmed,
  2. Mark J. Jackson and
  3. Michael D. Whitfield

Published Online: 26 JAN 2010

DOI: 10.1002/9780470611807.ch3

Nano and Micromachining

Nano and Micromachining

How to Cite

Ahmed, W., Jackson, M. J. and Whitfield, M. D. (2010) Diamond Tools in Micromachining, in Nano and Micromachining (eds J. P. Davim and M. J. Jackson), ISTE, London, UK. doi: 10.1002/9780470611807.ch3

Publication History

  1. Published Online: 26 JAN 2010
  2. Published Print: 1 JAN 2009

ISBN Information

Print ISBN: 9781848211032

Online ISBN: 9780470611807

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Keywords:

  • micromachining processes;
  • geometric components;
  • traditional electroplating;
  • activation energy;
  • species generation

Summary

This chapter contains sections titled:

  • Introduction

  • Diamond technology

  • Preparation of substrate

  • Modified HFCVD process

  • Nucleation and diamond growth

  • Deposition on complex substrates

  • Diamond micromachining

  • Conclusions

  • References