6. Non-Conventional Processes: Laser Micromachining

  1. J. Paulo Davim and
  2. Mark J. Jackson
  1. Grant M. Robinson and
  2. Mark J. Jackson

Published Online: 26 JAN 2010

DOI: 10.1002/9780470611807.ch6

Nano and Micromachining

Nano and Micromachining

How to Cite

Robinson, G. M. and Jackson, M. J. (2009) Non-Conventional Processes: Laser Micromachining, in Nano and Micromachining (eds J. P. Davim and M. J. Jackson), ISTE, London, UK. doi: 10.1002/9780470611807.ch6

Publication History

  1. Published Online: 26 JAN 2010
  2. Published Print: 1 JAN 2009

ISBN Information

Print ISBN: 9781848211032

Online ISBN: 9780470611807

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Keywords:

  • pyrolithic processing;
  • atomic bonds;
  • fabricate features;
  • wavelength photons;
  • maximum temperature

Summary

This chapter contains sections titled:

  • Introduction

  • Fundamentals of lasers

  • Laser microfabrication

  • Laser nanofabrication

  • Conclusions

  • References