7. Evaluation of Subsurface Damage in Nano and Micromachining

  1. J. Paulo Davim and
  2. Mark J. Jackson
  1. Jianmei Zhang,
  2. Jiangang Sun and
  3. Zhijian Pei

Published Online: 26 JAN 2010

DOI: 10.1002/9780470611807.ch7

Nano and Micromachining

Nano and Micromachining

How to Cite

Zhang, J., Sun, J. and Pei, Z. (2009) Evaluation of Subsurface Damage in Nano and Micromachining, in Nano and Micromachining (eds J. P. Davim and M. J. Jackson), ISTE, London, UK. doi: 10.1002/9780470611807.ch7

Publication History

  1. Published Online: 26 JAN 2010
  2. Published Print: 1 JAN 2009

ISBN Information

Print ISBN: 9781848211032

Online ISBN: 9780470611807

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Keywords:

  • subsequent processes;
  • damage evaluation technologies;
  • optical microscope;
  • subsurface damage;
  • cross-sectional microscopy

Summary

This chapter contains sections titled:

  • Introduction

  • Destructive evaluation technologies

  • Non-destructive evaluation technologies

  • Acknowledgements

  • References