Chapter 7. Evaluation of Subsurface Damage in Nano and Micromachining

  1. J. Paulo Davim,
  2. Mark J. Jackson
  1. Jianmei Zhang,
  2. Jiangang Sun,
  3. Zhijian Pei

Published Online: 26 JAN 2010

DOI: 10.1002/9780470611807.ch7

Book Title

Nano and Micromachining

Nano and Micromachining

Additional Information

How to Cite

Zhang, J., Sun, J. and Pei, Z. (2010) Evaluation of Subsurface Damage in Nano and Micromachining, in Nano and Micromachining (eds J. P. Davim and M. J. Jackson), ISTE, London, UK. doi: 10.1002/9780470611807.ch7

Publication History

  1. Published Online: 26 JAN 2010
  2. Published Print: 1 JAN 2009

ISBN Information

Print ISBN: 9781848211032

Online ISBN: 9780470611807

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CHAPTER TOOLS

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Keywords:

  • subsequent processes;
  • damage evaluation technologies;
  • optical microscope;
  • subsurface damage;
  • cross-sectional microscopy

Summary

This chapter contains sections titled:

  • Introduction

  • Destructive evaluation technologies

  • Non-destructive evaluation technologies

  • Acknowledgements

  • References

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