Chapter 8. Applications of Nano and Micromachining in Industry
- J. Paulo Davim,
- Mark J. Jackson
Published Online: 26 JAN 2010
DOI: 10.1002/9780470611807.ch8
Copyright © 2009 ISTE Ltd.
Book Title

Nano and Micromachining
Additional Information
How to Cite
Yan, J. (2010) Applications of Nano and Micromachining in Industry, in Nano and Micromachining (eds J. P. Davim and M. J. Jackson), ISTE, London, UK. doi: 10.1002/9780470611807.ch8
Publication History
- Published Online: 26 JAN 2010
- Published Print: 1 JAN 2009
ISBN Information
Print ISBN: 9781848211032
Online ISBN: 9780470611807
- Summary
- Chapter
- References
Keywords:
- optoelectronic components;
- high accuracy components;
- manufacturing industries;
- semiconductor substrates;
- liquid crystal display
Summary
This chapter contains sections titled:
Introduction
Typical machining methods
Applications in optical manufacturing
Semiconductor and electronics related applications
Summary
Acknowledgements
References
