11. New Technologies and Materials

  1. Pavel Ripka and
  2. Alois Tipek
  1. A. Tipek,
  2. P. Ripka,
  3. E. Hulicius,
  4. A. Hospodková and
  5. P. Neužil

Published Online: 5 JAN 2010

DOI: 10.1002/9780470612231.ch11

Modern Sensors Handbook

Modern Sensors Handbook

How to Cite

Tipek, A., Ripka, P., Hulicius, E., Hospodková, A. and Neužil, P. (2007) New Technologies and Materials, in Modern Sensors Handbook (eds P. Ripka and A. Tipek), ISTE, London, UK. doi: 10.1002/9780470612231.ch11

Publication History

  1. Published Online: 5 JAN 2010
  2. Published Print: 1 JAN 2007

ISBN Information

Print ISBN: 9781905209668

Online ISBN: 9780470612231

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Keywords:

  • crystal growth;
  • chemical reactions;
  • laser assisted etching;
  • microelectrodischarging;
  • microdrip fabrication

Summary

This chapter contains sections titled:

  • Introduction: MEMS

  • Materials

  • Silicon planar IC technology

  • Deposition technologies

  • Etching processes

  • 3-D microfabrication techniques

  • References