Standard Article

Si-Containing Ceramic Precursors

Organic Silicon Compounds (1998)

  1. R. M. Laine1,
  2. A. Sellinger2

Published Online: 15 DEC 2009

DOI: 10.1002/9780470682531.pat0201

Patai's Chemistry of Functional Groups

Patai's Chemistry of Functional Groups

How to Cite

Laine, R. M. and Sellinger, A. 2009. Si-Containing Ceramic Precursors. Patai's Chemistry of Functional Groups. .

Author Information

  1. 1

    University of Michigan, Departments of Materials Science and Engineering and Chemistry, Ann Arbor, MI, USA

  2. 2

    University of New Mexico, Sandia National Laboratory, Advanced Materials Laboratory, Albuquerque, NM, USA

Publication History

  1. Published Online: 15 DEC 2009

Abstract

  • 1
    Introduction
  • 2
    Criteria that Define a Useful Precursor
  • 3
    Precursors Containing Si and N
  • 4
    Precursors Containing Si and C
  • 5
    Precursors to Si[BOND]O Containing Materials

Keywords:

  • Si-containing compounds or polymers;
  • chemical vapor deposition, CVD;
  • microstructure and densification control;
  • Si-containing ceramic precursors;
  • Tonen group - combined synthesis and processing approach;
  • precursors to SiO containing materials;
  • group I and II silicate precursors;
  • NMR end group analysis