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Deposition of Metals and Metal Oxides by Means of Metal Enolates

Metal Enolates (2009)

  1. Heinrich Lang,
  2. Roy Buschbeck

Published Online: 15 SEP 2010

DOI: 10.1002/9780470682531.pat0433

Patai's Chemistry of Functional Groups

Patai's Chemistry of Functional Groups

How to Cite

Lang, H. and Buschbeck, R. 2010. Deposition of Metals and Metal Oxides by Means of Metal Enolates. Patai's Chemistry of Functional Groups.

Author Information

  1. Technische Universität Chemnitz, Fakultät für Naturwissenschaften, Institut für Chemie, Lehrstuhl für Anorganische Chemie, Chemnitz, Germany

Publication History

  1. Published Online: 15 SEP 2010

Abstract

  • 1
    Introduction
  • 2
    Deposition Techniques
  • 3
    Metal Deposition
  • 4
    Metal Oxide Deposition

Keywords:

  • deposition of metals and metal oxides by means of metal enolates;
  • deposition techniques - gas-phase transfer of precursor;
  • spreading of precursor viscid solutions;
  • metal deposition - transition metal elements;
  • Group 9 elements - cobalt, rhodium, iridium;
  • Group 11 elements;
  • metal oxide deposition - main group elements;
  • mixed metal oxides - superconducting metal oxides (SMOs)