Standard Article

Deposition of Metals and Metal Oxides by Means of Metal Enolates

Metal Enolates (2009)

  1. Heinrich Lang,
  2. Roy Buschbeck

Published Online: 15 SEP 2010

DOI: 10.1002/9780470682531.pat0433

Patai's Chemistry of Functional Groups

Patai's Chemistry of Functional Groups

How to Cite

Lang, H. and Buschbeck, R. 2010. Deposition of Metals and Metal Oxides by Means of Metal Enolates. Patai's Chemistry of Functional Groups. .

Author Information

  1. Technische Universität Chemnitz, Fakultät für Naturwissenschaften, Institut für Chemie, Lehrstuhl für Anorganische Chemie, Chemnitz, Germany

Publication History

  1. Published Online: 15 SEP 2010

Abstract

  • 1
    Introduction
  • 2
    Deposition Techniques
  • 3
    Metal Deposition
  • 4
    Metal Oxide Deposition

Keywords:

  • deposition of metals and metal oxides by means of metal enolates;
  • deposition techniques - gas-phase transfer of precursor;
  • spreading of precursor viscid solutions;
  • metal deposition - transition metal elements;
  • Group 9 elements - cobalt, rhodium, iridium;
  • Group 11 elements;
  • metal oxide deposition - main group elements;
  • mixed metal oxides - superconducting metal oxides (SMOs)

Featured Compounds

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  1. 1 - 103
Compound 1
Molecular Weight:351.938
Molecular Formula:C7H7F6InO2
InChIKey:FKAFHAKQMQTWOP-GRHBHMESSA-M
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Compound 2
Molecular Weight:1094.5025
Molecular Formula:C30H30BiF21O6
InChIKey:VCVIHJJKWLQDBL-KYQUTVEVSA-K
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Compound 3
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 3a
Molecular Weight:571.19
Molecular Formula:C12H2F12O6Ru
InChIKey:BQUVUVTXGPMTNS-CABKSMEESA-L
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Compound 3b
Molecular Weight:463.25
Molecular Formula:C12H8F6O6Ru
InChIKey:MZPIXKNBWIBODZ-RKOUXUPRSA-L
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Compound 3c
Molecular Weight:523.62
Molecular Formula:C24H38O6Ru
InChIKey:XGBHKZYFSRSZJR-SZCNHXKKSA-L
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Compound 4a
Molecular Weight:256.2
Molecular Formula:C7H7O4Ru
InChIKey:MQSGMUJVOOXRED-PHDLFUHSSA-M
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Compound 4
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 4b
Molecular Weight:364.14
Molecular Formula:C7HF6O4Ru
InChIKey:OUCRPCNOWVUICK-DYNMZUSMSA-M
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Compound 4c
Molecular Weight:340.36
Molecular Formula:C13H19O4Ru
InChIKey:GWGUCCQNLLRJJR-VKMPSEBQSA-M
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Compound 5a
Molecular Weight:280.9769
Molecular Formula:C12H18N2NiO2
InChIKey:JMGPSUTYAMVGKY-IMJRPSDRSA-L
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Compound 5b
Molecular Weight:295.0035
Molecular Formula:C13H20N2NiO2
InChIKey:SJLUAARQDUTVTJ-DBZHCQPASA-L
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Compound 5c
Molecular Weight:295.0035
Molecular Formula:C13H20N2NiO2
InChIKey:QSMWVXSLWIRPBN-QONHSZDZSA-L
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Compound 5d
Molecular Weight:329.0197
Molecular Formula:C16H18N2NiO2
InChIKey:OEBHDTRWSNUPLL-HWPXEBIHSA-L
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Compound 5
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 7c
Molecular Weight:477.647
Molecular Formula:C10H2CuF12O4
InChIKey:HZXGNBMOOYOYIS-PAMPIZDHSA-L
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Compound 6
Molecular Weight:678.591
Molecular Formula:C16H32O4Pt2
InChIKey:QDVSCOYOOAGMNH-NJZCUNSBSA-L
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Compound 7a
Molecular Weight:261.762
Molecular Formula:C10H14CuO4
InChIKey:QYJPSWYYEKYVEJ-FDGPNNRMSA-L
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Compound 7b
Molecular Weight:369.705
Molecular Formula:C10H8CuF6O4
InChIKey:AVPIDDUYDBZFGY-OZWADYBTSA-L
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Compound 7d
Molecular Weight:430.081
Molecular Formula:C22H38CuO4
InChIKey:VCIKJQZFNVXWPF-ATMONBRVSA-L
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Compound 7e
Molecular Weight:553.879
Molecular Formula:C18H20CuF10O4
InChIKey:XUZTVNFCFINLDY-SJGYQHGCSA-L
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Compound 7f
Molecular Weight:653.894
Molecular Formula:C20H20CuF14O4
InChIKey:LWEFRUQWNHGRQM-SJGYQHGCSA-L
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Compound 8a
Molecular Weight:259.792
Molecular Formula:C10H16CuN2O2
InChIKey:HFHWFNSGJVOMCH-UHFFFAOYSA-L
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Compound 8b
Molecular Weight:639.727
Molecular Formula:C14H6CuF18N2O2
InChIKey:LDEAJGFHPJRESH-UHFFFAOYSA-L
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Compound 9
Molecular Weight:289.861
Molecular Formula:C12H22CuN2O2
InChIKey:RFUQOXILYVHKEU-UHFFFAOYSA-N
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Compound 7
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 8
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 10a
Molecular Weight:346.674
Molecular Formula:C8H10CuF6O2P
InChIKey:KKJGRDIHDXJEMV-UAIGNFCESA-M
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Compound 10b
Molecular Weight:388.754
Molecular Formula:C11H16CuF6O2P
InChIKey:AOKRGDSZBJNRQF-FJOGWHKWSA-M
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Compound 10c
Molecular Weight:378.778
Molecular Formula:C13H13CuF6O2
InChIKey:KQWARMCCYOITKR-OJKFPHAYSA-M
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Compound 10d
Molecular Weight:324.687
Molecular Formula:C9H7CuF6O2
InChIKey:ISCYTDRPPVWMFZ-UAIGNFCESA-M
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Compound 10e
Molecular Weight:440.996
Molecular Formula:C13H19CuF6O2Si2
InChIKey:YESCMKQKTNVQCY-FJOGWHKWSA-M
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Compound 10f
Molecular Weight:408.879
Molecular Formula:C13H15CuF6O2Si
InChIKey:MNYBQTQLKFBVAC-FJOGWHKWSA-M
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Compound 11a
Molecular Weight:364.97
Molecular Formula:C17H34CuO2P
InChIKey:DUHYEGARAAMVML-LWFKIUJUSA-M
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Compound 12a
Molecular Weight:567.287
Molecular Formula:C29H61CuO2P2
InChIKey:OTKZOSVTLIVKFN-DVACKJPTSA-M
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Compound 13a
Molecular Weight:434.797
Molecular Formula:C13H19CuF7O2P
InChIKey:MFVVVIFWVYDALF-WNCVTPEDSA-M
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Compound 13b
Molecular Weight:412.81
Molecular Formula:C14H16CuF7O2
InChIKey:IGUAYTGYZWNVCR-WNCVTPEDSA-M
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Compound 13c
Molecular Weight:529.12
Molecular Formula:C18H28CuF7O2Si2
InChIKey:PBZLFMNLIBKZLW-WNCVTPEDSA-M
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Compound 14a
Molecular Weight:654.302
Molecular Formula:C35H49CuN3O3P
InChIKey:REVBRPPJVNZUMU-HXIBTQJOSA-M
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Compound 11b
Molecular Weight:333.053
Molecular Formula:C13H25CuO2Si2
InChIKey:PLZKGRXBYBCLEI-LWFKIUJUSA-M
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Compound 15
Molecular Weight:292.703
Molecular Formula:C8H13CuF3O2P
InChIKey:IACYDWOAZJKMFZ-IUDDPPFWSA-M
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Compound 16
Molecular Weight:645.342
Molecular Formula:C18H10Cu2F12O4
InChIKey:VSYGFNHKKQROIH-RZMFSWHESA-L
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Compound 10g
Molecular Weight:324.687
Molecular Formula:C9H7CuF6O2
InChIKey:MCVNEXKZCTZGHY-UAIGNFCESA-M
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Compound 10h
Molecular Weight:298.607
Molecular Formula:C6HCuF6O3
InChIKey:NCJGPILEPDLSQH-UAIGNFCESA-M
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Compound 10i
Molecular Weight:406.831
Molecular Formula:C15H17CuF6O2
InChIKey:CAWKHRFRAMKMQI-BPYHEMNXSA-M
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Compound 10k
Molecular Weight:364.751
Molecular Formula:C12H11CuF6O2
InChIKey:IAHLRSLTELWDRY-FJOGWHKWSA-M
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Compound 10j
Molecular Weight:350.724
Molecular Formula:C11H9CuF6O2
InChIKey:LLZBMENDOOOTGI-FJOGWHKWSA-M
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Compound 10l
Molecular Weight:354.756
Molecular Formula:C11H13CuF6O2
InChIKey:OZQVQRHUGYRRKY-FJOGWHKWSA-M
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Compound 10m
Molecular Weight:354.756
Molecular Formula:C11H13CuF6O2
InChIKey:LSWRPGVITYRXIM-FJOGWHKWSA-M
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Compound 10n
Molecular Weight:356.729
Molecular Formula:C10H11CuF6O3
InChIKey:WDQKCSHFODFSQK-UAIGNFCESA-M
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Compound 10o
Molecular Weight:370.831
Molecular Formula:C10H13CuF6O2Si
InChIKey:SOLIFJWHTWMEFM-UAIGNFCESA-M
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Compound 10p
Molecular Weight:384.858
Molecular Formula:C11H15CuF6O2Si
InChIKey:CQQDICNUPLKRRP-FJOGWHKWSA-M
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Compound 10
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 11
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 10'
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 17
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 18
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 19
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 20
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 21
Molecular Weight:389.091
Molecular Formula:C11H15F6O5Ti
InChIKey:DRKLCBYMIKIOOY-FJOGWHKWSA-M
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Compound 22
Molecular Weight:477.196
Molecular Formula:C15H23F6O7Ti
InChIKey:QAZLAMIEDURYQC-FJOGWHKWSA-M
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Compound 23a
Molecular Weight:405.4
Molecular Formula:C10H14O4Pb
InChIKey:UNNUWSQNTAFLDC-OHSCNOFNSA-L
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Compound 23b
Molecular Weight:621.3
Molecular Formula:C10H2F12O4Pb
InChIKey:VPDFYHDIFAQDGC-OZOHXUEYSA-L
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Compound 23c
Molecular Weight:573.7
Molecular Formula:C22H38O4Pb
InChIKey:RFDHUANRWFSKRW-ATMONBRVSA-L
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Compound 23d
Molecular Weight:1621.5
Molecular Formula:C30H2F52O4Pb
InChIKey:BSKZCROFPWXXBU-PAMPIZDHSA-L
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Compound 23e
Molecular Weight:513.4
Molecular Formula:C10H8F6O4Pb
InChIKey:ZMXOHUPEFQCNMP-GZBCLGFCSA-L
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Compound 23f
Molecular Weight:597.5
Molecular Formula:C16H20F6O4Pb
InChIKey:WNVNUAALCBEQKU-NHCZTASLSA-L
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Compound 23g
Molecular Weight:605.7
Molecular Formula:C22H38O6Pb
InChIKey:NEYQBUNNACHEHG-CXNVIHHOSA-L
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Compound 23
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 24
Molecular Weight:922.0552
Molecular Formula:C45H84LaNO9
InChIKey:LBYNTFCQDYBYQZ-PRTBJVMOSA-K
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Compound 25
Molecular Weight:910.9862
Molecular Formula:C43H79LaO11
InChIKey:PWEJXWIPTXFGQX-YCLPLZAJSA-K
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Compound 26a
Molecular Weight:364.257
Molecular Formula:C16H28O6Ti
InChIKey:OVSGBKZKXUMMHS-VVDZMTNVSA-L
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Compound 26b
Molecular Weight:532.576
Molecular Formula:C28H52O6Ti
InChIKey:FXUGBFBGCBGWKX-FTHVFMQUSA-L
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Compound 26c
Molecular Weight:580.142
Molecular Formula:C16H16F12O6Ti
InChIKey:YDLRUOLDGXAYIV-NFMYELBMSA-L
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Compound 26d
Molecular Weight:488.396
Molecular Formula:C26H32O6Ti
InChIKey:KXPHJFZHTXPGEC-FTHVFMQUSA-L
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Compound 26e
Molecular Weight:612.534
Molecular Formula:C36H36O6Ti
InChIKey:HAWLUPHSYKBKOE-XNPXGEDOSA-L
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Compound 26f
Molecular Weight:480.415
Molecular Formula:C22H40O8Ti
InChIKey:BENRVVBOLVBONW-LWJYSMRHSA-L
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Compound 27
Molecular Weight:532.576
Molecular Formula:C28H52O6Ti
InChIKey:WAXJAIJZRCMPNX-KTPKZLLLSA-L
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Compound 28
Molecular Weight:478.399
Molecular Formula:C22H38O8Ti
InChIKey:IISCYBSODUHGJC-JRCUNKIOSA-L
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Compound 29a
Molecular Weight:330.202
Molecular Formula:C14H22N2O4Ti
InChIKey:JCYFBLHDPZKREY-UHFFFAOYSA-L
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Compound 29b
Molecular Weight:358.256
Molecular Formula:C16H26N2O4Ti
InChIKey:XDYYHQGMZAIBSU-UHFFFAOYSA-L
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Compound 29c
Molecular Weight:358.256
Molecular Formula:C16H26N2O4Ti
InChIKey:OROVLQNCEKZKBS-UHFFFAOYSA-L
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Compound 29d
Molecular Weight:386.309
Molecular Formula:C18H30N2O4Ti
InChIKey:ADJMWLUJFREWCE-UHFFFAOYSA-L
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Compound 29e
Molecular Weight:470.468
Molecular Formula:C24H42N2O4Ti
InChIKey:GPTNUAFHVWTBBC-UHFFFAOYSA-L
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Compound 26
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 29
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 30
Molecular Weight:922.48
Molecular Formula:C51H90O8Zr
InChIKey:XLGJHRMZGRGKEP-LXLHXBFOSA-J
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Compound 31
Molecular Weight:824.293
Molecular Formula:C44H76O8Zr
InChIKey:BYIIHUPQROFLLY-OAODARJKSA-J
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Compound 32
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 33
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 32b
Molecular Weight:476.21
Molecular Formula:C14H28O6W
InChIKey:YCSFMOXTTFQOHB-GLUPTGNJSA-M
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Compound 33b
Molecular Weight:584.15
Molecular Formula:C14H22F6O6W
InChIKey:ZAWUMSDQGFGUSF-XBOSCTMBSA-M
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Compound 32a
Molecular Weight:518.29
Molecular Formula:C17H34O6W
InChIKey:UWHDNNHUSLHISX-GLUPTGNJSA-M
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Compound 33a
Molecular Weight:626.23
Molecular Formula:C17H28F6O6W
InChIKey:ZKDJNRQNGJBATH-XBOSCTMBSA-M
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Compound 34a
Molecular Weight:373.3536
Molecular Formula:C16H30CoN2O4
InChIKey:OYOHQWHULCBQQJ-WHYSZIHHSA-L
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Compound 34b
Molecular Weight:541.6726
Molecular Formula:C28H54CoN2O4
InChIKey:SOSAXVYBGDLQSM-CXWYYQLFSA-L
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Compound 35a
Molecular Weight:346.2852
Molecular Formula:C14H25CoNO5
InChIKey:VFVAAUFUVPQWAS-SKKUODCZSA-L
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Compound 35b
Molecular Weight:514.6042
Molecular Formula:C26H49CoNO5
InChIKey:XDYQRLULAPKJNG-CXWYYQLFSA-L
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Compound 36a
Molecular Weight:360.3118
Molecular Formula:C15H27CoNO5
InChIKey:JDYDACWLNOYSSU-WHYSZIHHSA-L
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Compound 36b
Molecular Weight:528.6307
Molecular Formula:C27H51CoNO5
InChIKey:CFZULYLETODBSX-CXWYYQLFSA-L
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Compound 34
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 35
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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Compound 36
Molecular Weight:Not Available
Molecular Formula:Not Available
InChIKey:Not Available
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  1. 1 - 103