10. High-Performance Microelectronics

  1. Michael S. Silverstein2,
  2. Neil R. Cameron3 and
  3. Marc A. Hillmyer4
  1. Charles T. Black

Published Online: 25 JAN 2011

DOI: 10.1002/9780470929445.ch10

Porous Polymers

Porous Polymers

How to Cite

Black, C. T. (2011) High-Performance Microelectronics, in Porous Polymers (eds M. S. Silverstein, N. R. Cameron and M. A. Hillmyer), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470929445.ch10

Editor Information

  1. 2

    Department of Materials Engineering, Technion – Israel Institute of Technology, Haifa, Israel

  2. 3

    Department of Chemistry, University of Durham, Durham, UK

  3. 4

    Department of Chemistry, University of Minnesota, Minneapolis, Minnesota, USA

Author Information

  1. Brookhaven National Laboratory, Upton, New York, USA

Publication History

  1. Published Online: 25 JAN 2011
  2. Published Print: 18 MAR 2011

ISBN Information

Print ISBN: 9780470390849

Online ISBN: 9780470929445



  • high-performance microelectronics - fabrication process integration, based on porous block copolymer material in high-performance semiconductor devices;
  • engineering permittivity, of dielectric materials - self-assembled porous polymer template affecting IC performance;
  • porous polymer materials - pore location precise control on surface


This chapter contains sections titled:

  • Introduction

  • Block Copolymer Templates: Pore Density and Porosity

  • Engineering Dielectric Permittivity

  • Increasing Device Surface Area

  • Field-Effect Transistor Contact Holes

  • Summary

  • Acknowledgments

  • Abbreviations

  • References