Processing of Complex-Shaped Micro Parts by Reaction-Bonding and Sintering of Silicon Nitride

  1. Tatsuki Ohji,
  2. Mrityunjay Singh and
  3. Sanjay Mathur
  1. M. Müller1,
  2. W. Bauer1,
  3. R. Knitter1 and
  4. J. Rögner2

Published Online: 19 NOV 2010

DOI: 10.1002/9780470944066.ch20

Advanced Processing and Manufacturing Technologies for Structural and Multifunctional Materials IV: Ceramic Engineering and Science Proceedings, Volume 31

Advanced Processing and Manufacturing Technologies for Structural and Multifunctional Materials IV: Ceramic Engineering and Science Proceedings, Volume 31

How to Cite

Müller, M., Bauer, W., Knitter, R. and Rögner, J. (2010) Processing of Complex-Shaped Micro Parts by Reaction-Bonding and Sintering of Silicon Nitride, in Advanced Processing and Manufacturing Technologies for Structural and Multifunctional Materials IV: Ceramic Engineering and Science Proceedings, Volume 31 (eds T. Ohji, M. Singh and S. Mathur), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470944066.ch20

Author Information

  1. 1

    Karlsruhe Institute of Technology, (KIT), Institute for Materials Research III, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany.

  2. 2

    Karlsruhe Institute of Technology, (KIT), Institute for Materials Science and Engineering I, Kaiserstr. 12, 76131 Karlsruhe, Germany.

Publication History

  1. Published Online: 19 NOV 2010
  2. Published Print: 27 SEP 2010

ISBN Information

Print ISBN: 9780470594735

Online ISBN: 9780470944066

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Keywords:

  • reaction bonding;
  • sintering;
  • silicon nitride;
  • injection molding;
  • thermal debinding

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental

  • Results and Discussion

  • Conclusion

  • Acknowledgment