2. Micro-Fabrication Processes in Semiconductor Industry

  1. Muammer Koç2,3 and
  2. Tuğrul Özel4
  1. Kasif Teker

Published Online: 14 MAR 2011

DOI: 10.1002/9781118010570.ch2

Micro-Manufacturing: Design and Manufacturing of Micro-Products

Micro-Manufacturing: Design and Manufacturing of Micro-Products

How to Cite

Teker, K. (2011) Micro-Fabrication Processes in Semiconductor Industry, in Micro-Manufacturing: Design and Manufacturing of Micro-Products (eds M. Koç and T. Özel), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118010570.ch2

Editor Information

  1. 2

    Center for Precision Forming, (CPF-National Science Foundation IUCRC), Virginia Commonwealth University (VCU), Richmond, VA, USA

  2. 3

    Istanbul Sehir University, Istanbul, Turkey

  3. 4

    Manufacturing Automation Research Laboratory, School of Engineering, Industrial and Systems Engineering, Rutgers University, Piscataway, New Jersey, USA

Author Information

  1. Department of Physics & Engineering, Frostburg State University, Maryland, Maryland, USA

Publication History

  1. Published Online: 14 MAR 2011
  2. Published Print: 25 APR 2011

ISBN Information

Print ISBN: 9780470556443

Online ISBN: 9781118010570



  • micro-fabrication processes in semiconductor industry - common micro-fabrication techniques for ICs and micro-machines;
  • IC and micro-machine fabrication - requiring lithography, transferring patterns onto a surface of substrate by photolithography;
  • dry etching techniques - selective material removal from substrate by physical or chemical processes, etching mechanism due to momentum transfer


This chapter contains sections titled:

  • Introduction

  • Semiconductor Substrates

  • Chemical Vapor Deposition (CVD)

  • Lithography

  • Physical Vapor Deposition (PVD)

  • Dry Etching Techniques

  • Wet Bulk Micro-Machining

  • Summary

  • References