4. Metrology, Inspection, and Process Control in Micro-Scales
- Muammer Koç3,4 and
- Tuğrul Özel5
Published Online: 14 MAR 2011
Copyright © 2011 John Wiley & Sons, Inc.
Micro-Manufacturing: Design and Manufacturing of Micro-Products
How to Cite
Karhade, O. G. and Kurfess, T. R. (2011) Metrology, Inspection, and Process Control in Micro-Scales, in Micro-Manufacturing: Design and Manufacturing of Micro-Products (eds M. Koç and T. Özel), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118010570.ch4
Center for Precision Forming, (CPF-National Science Foundation IUCRC), Virginia Commonwealth University (VCU), Richmond, VA, USA
Istanbul Sehir University, Istanbul, Turkey
Manufacturing Automation Research Laboratory, School of Engineering, Industrial and Systems Engineering, Rutgers University, Piscataway, New Jersey, USA
- Published Online: 14 MAR 2011
- Published Print: 25 APR 2011
Print ISBN: 9780470556443
Online ISBN: 9781118010570
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