Effect of the Duty Cycle on the Microstructural, Mechanical and Tribological Properties of TiN Layers Deposited by PACVD

  1. The Minerals, Metals & Materials Society (TMS)
  1. M. S. Mahdipoor1,
  2. M. Montazeri2,
  3. M. Soltanieh2,
  4. F. Mahboubi1,
  5. Sh. Ahangarani3 and
  6. M. H. Habibi4

Published Online: 25 APR 2011

DOI: 10.1002/9781118062111.ch11

Supplemental Proceedings: Materials Processing and Energy Materials, Volume 1

Supplemental Proceedings: Materials Processing and Energy Materials, Volume 1

How to Cite

The Minerals, Metals & Materials Society (TMS) (2011) Effect of the Duty Cycle on the Microstructural, Mechanical and Tribological Properties of TiN Layers Deposited by PACVD, in Supplemental Proceedings: Materials Processing and Energy Materials, Volume 1, John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118062111.ch11

Author Information

  1. 1

    Department of Mining and Metallurgical Engineering, Amirkabir University of Technology, Tehran, Iran

  2. 2

    Department of Materials and Metallurgical Engineering, Iran University of Science and Technology, Tehran, Iran

  3. 3

    Advanced Materials & renewable Energies Department, Iranian Research Organization for Science and Technology, Iran

  4. 4

    Materias Science and Engineering Department, University of Tehran, Tehran, Iran

Publication History

  1. Published Online: 25 APR 2011
  2. Published Print: 28 FEB 2011

ISBN Information

Print ISBN: 9781118029459

Online ISBN: 9781118062111

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Keywords:

  • PACVD;
  • TiN Coating;
  • Microstructural Properties;
  • Wear

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental Details

  • Results and Discussion

  • Conclusions