28. Shave-Off Profiling as a Nanoscale 3-D Element Imaging Technique

  1. Hiroyuki Ohshima
  1. Masashi Nojima

Published Online: 31 JAN 2012

DOI: 10.1002/9781118135440.ch28

Electrical Phenomena at Interfaces and Biointerfaces: Fundamentals and Applications in Nano-, Bio-, and Environmental Sciences

Electrical Phenomena at Interfaces and Biointerfaces: Fundamentals and Applications in Nano-, Bio-, and Environmental Sciences

How to Cite

Nojima, M. (2012) Shave-Off Profiling as a Nanoscale 3-D Element Imaging Technique, in Electrical Phenomena at Interfaces and Biointerfaces: Fundamentals and Applications in Nano-, Bio-, and Environmental Sciences (ed H. Ohshima), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118135440.ch28

Editor Information

  1. Center for Colloid and Interface Science, Research Institute for Science and Technology, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan

Author Information

  1. Center for Colloid and Interface Science, Research Institute for Science and Technology, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan

Publication History

  1. Published Online: 31 JAN 2012
  2. Published Print: 9 MAR 2012

ISBN Information

Print ISBN: 9780470582558

Online ISBN: 9781118135440

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Keywords:

  • shave-off profiling;
  • multilane shave-off, and 2-D;
  • nanoscale 3-D

Summary

This chapter contains sections titled:

  • Introduction

  • Shave-Off Profiling

  • Concluding Remarks

  • Acknowledgments

  • References