2. Patterning Technology for Micro/Nanomold Fabrication

  1. Shinill Kang

Published Online: 19 MAR 2012

DOI: 10.1002/9781118146965.ch2

Micro/Nano Replication: Processes and Applications

Micro/Nano Replication: Processes and Applications

How to Cite

Kang, S. (2012) Patterning Technology for Micro/Nanomold Fabrication, in Micro/Nano Replication: Processes and Applications, John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118146965.ch2

Publication History

  1. Published Online: 19 MAR 2012
  2. Published Print: 16 MAR 2012

ISBN Information

Print ISBN: 9780470392133

Online ISBN: 9781118146965

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Keywords:

  • micro/nanomold, patterning technology;
  • reflow, and laser interference lithography;
  • electroforming, metallic mold for patterned media

Summary

This chapter contains sections titled:

  • Material Removal Process

  • Lithography Process

  • Electroforming Processes

  • References