5. Hot Embossing of Microstructured Surfaces and Thermal Nanoimprinting

  1. Shinill Kang

Published Online: 19 MAR 2012

DOI: 10.1002/9781118146965.ch5

Micro/Nano Replication: Processes and Applications

Micro/Nano Replication: Processes and Applications

How to Cite

Kang, S. (2012) Hot Embossing of Microstructured Surfaces and Thermal Nanoimprinting, in Micro/Nano Replication: Processes and Applications, John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118146965.ch5

Publication History

  1. Published Online: 19 MAR 2012
  2. Published Print: 16 MAR 2012

ISBN Information

Print ISBN: 9780470392133

Online ISBN: 9781118146965

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Keywords:

  • microstructured surfaces, hot embossing;
  • thermal nanoimprinting, for microlenses, nanopatterns;
  • microcompression molding process application

Summary

This chapter contains sections titled:

  • Introduction

  • Development of Microcompression Molding Process

  • Temperature Dependence of Anti-Adhesion Between a Mold and the Polymer in Thermal Imprinting Processes

  • Fabrication of a Micro-Optics Using Microcompression Molding with a Silicon Mold Insert

  • Fabrication of a Microlens Array Using Microcompression Molding with an Electroforming Mold Insert

  • Application of Microcompression Molding Process

  • References