41. Analysis of thin and thick Films

  1. Mike S. Lee
  1. Philippe Le Coustumer1,
  2. Patrick Chapon2,
  3. Agnès Tempez3,
  4. Yuriy Popov3,
  5. George Thompson4,
  6. Igor Molchan4,
  7. Nicolas Trigoulet4,
  8. Peter Skeldon4,
  9. Antonino Licciardello5,
  10. Nunzio Tuccitto5,
  11. Ivan Delfanti5,
  12. Katrin Fuhrer6,
  13. Marc Gonin6,
  14. James Whitby6,7,
  15. Markus Hohl6,
  16. Christian Tanner6,
  17. Nerea Bordel Garcia8,
  18. Lara Lobo Revilla8,
  19. Jorge Pisonero8,
  20. Rosario Pereiro8,
  21. Cristina Gonzalez Gago8,
  22. Alfredo Sanz Medel8,
  23. Mihai Ganciu Petcu9,
  24. Ani Surmeian9,
  25. Constantin Diplasu9,
  26. Andreea Groza9,
  27. Norbert Jakubowski10,
  28. Roland Dorka10,
  29. Stela Canulescu11,
  30. Johann Michler7,
  31. Philippe Belenguer11,
  32. Thomas Nelis11,
  33. Abdellatif Zahri11,
  34. Philippe Guillot12,
  35. Laurent Thérèse12,
  36. Arnaud Littner13,
  37. Richard Vaux14,
  38. Julien Malherbe15,
  39. Frédéric Huneau1,
  40. Fred Stevie16 and
  41. Hugues François-Saint-Cyr17

Published Online: 21 MAY 2012

DOI: 10.1002/9781118180730.ch41

Mass Spectrometry Handbook

Mass Spectrometry Handbook

How to Cite

Coustumer, P. L., Chapon, P., Tempez, A., Popov, Y., Thompson, G., Molchan, I., Trigoulet, N., Skeldon, P., Licciardello, A., Tuccitto, N., Delfanti, I., Fuhrer, K., Gonin, M., Whitby, J., Hohl, M., Tanner, C., Garcia, N. B., Revilla, L. L., Pisonero, J., Pereiro, R., Gago, C. G., Medel, A. S., Petcu, M. G., Surmeian, A., Diplasu, C., Groza, A., Jakubowski, N., Dorka, R., Canulescu, S., Michler, J., Belenguer, P., Nelis, T., Zahri, A., Guillot, P., Thérèse, L., Littner, A., Vaux, R., Malherbe, J., Huneau, F., Stevie, F. and François-Saint-Cyr, H. (2012) Analysis of thin and thick Films, in Mass Spectrometry Handbook (ed M. S. Lee), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118180730.ch41

Editor Information

  1. Milestone Development Services, USA

Author Information

  1. 1

    University of Bordeaux, France

  2. 2

    Horiba Jobin Yvon, Longjumeau, France

  3. 3

    Horiba Jobin Yvon, France

  4. 4

    The University of Manchester, UK

  5. 5

    University of Catania, Italy

  6. 6

    Tofwerk AG, Switzerland

  7. 7

    EMPA Materials Science and Technology, Switzerland

  8. 8

    University of Oviedo, Spain

  9. 9

    National Institute of Lasers, Plasmas and Radiation Physics, Romania

  10. 10

    ISAS Dortmund, Germany

  11. 11

    University of Toulouse, France

  12. 12

    University of Albi, France

  13. 13

    ALMA Consulting Group, Gennevilliers, France

  14. 14

    Alma Consulting Group, Lyon, France

  15. 15

    NIST Washington, DC, USA

  16. 16

    North Carolina State University, Raleigh, NC, USA

  17. 17

    CAMECA, France

Publication History

  1. Published Online: 21 MAY 2012
  2. Published Print: 18 APR 2012

Book Series:

  1. Wiley Series on Pharmaceutical Science and Biotechnology: Practices, Applications and Methods

Book Series Editors:

  1. Mike S. Lee

Series Editor Information

  1. Milestone Development Services, USA

ISBN Information

Print ISBN: 9780470536735

Online ISBN: 9781118180730

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Keywords:

  • thin and thick film analysis, surface analysis and features;
  • ionization source with sensitive MS, flexible analytical platforms for layered material;
  • MS-based techniques and thin and thick layer chemical information;
  • major MS techniques in thin/thick film applications;
  • time of sputtering/speed of acquisition trade-off

Summary

This chapter contains sections titled:

  • Introduction

  • Thin and Thick Layers: A Tentative Definition

  • What Specific Information MS Techniques could Bring to thin and thick Films Analysis Compared to other Techniques?

  • Main MS Techniques Applied to Thin/Thick Films

  • Time of Sputtering/Speed of Acquisition Trade-Off

  • Differences in Sputtering/Ionization Mechanisms between SIMS and GD-MS

  • Pulse Shapes and how to Best Use Temporal Information for Pulsed Glow Discharge Mass Spectrometry

  • Measurement and Data Interpretation in GD-TOFMS

  • Practical Examples

  • Conclusions

  • List of Abbreviations

  • References