13. Grazing Angle ATR (GAATR) Spectroscopy

  1. Milan Milosevic

Published Online: 22 APR 2012

DOI: 10.1002/9781118309742.ch13

Internal Reflection and ATR Spectroscopy

Internal Reflection and ATR Spectroscopy

How to Cite

Milosevic, M. (2012) Grazing Angle ATR (GAATR) Spectroscopy, in Internal Reflection and ATR Spectroscopy, John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118309742.ch13

Author Information

  1. MeV Technologies LLC, Westport, Connecticut, USA

Publication History

  1. Published Online: 22 APR 2012
  2. Published Print: 1 JUN 2012

ISBN Information

Print ISBN: 9780470278321

Online ISBN: 9781118309742



  • GAATR spectroscopy;
  • ATR spectroscopy of thin films, on silicon substrate;
  • enhancement phenomenon, s- and p-polarized light;
  • film thickness and enhancement;
  • enhanced evanescent wave, perpendicular to interface


This chapter contains sections titled:

  • Attenuated Total Refl ection (ATR) Spectroscopy of Thin Films on Silicon Substrates

  • Enhancement for s- and p-Polarized Light

  • Enhancement and Film Thickness

  • Electric Fields in a Very Thin Film on a Si Substrate

  • Source of Enhancement

  • GAATR Spectroscopy