The In-situ Intrinsic Stress Measurements of Cu and Al Thin Films

  1. TMS
  1. Jun Young Yu and
  2. Youngman Kim

Published Online: 18 MAY 2012

DOI: 10.1002/9781118356074.ch37

Supplemental Proceedings: Materials Processing and Interfaces, Volume 1

Supplemental Proceedings: Materials Processing and Interfaces, Volume 1

How to Cite

Yu, J. Y. and Kim, Y. (2012) The In-situ Intrinsic Stress Measurements of Cu and Al Thin Films, in Supplemental Proceedings: Materials Processing and Interfaces, Volume 1 (ed TMS), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118356074.ch37

Publication History

  1. Published Online: 18 MAY 2012
  2. Published Print: 17 MAR 2012

ISBN Information

Print ISBN: 9781118296073

Online ISBN: 9781118356074

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Keywords:

  • thin film;
  • in-situ;
  • intrinsic stress

Summary

This chapter contains sections titled:

  • Introduction

  • Experiment Procedures

  • Results and Discussion

  • Conclusions