Formation of Crystalline and Amorphous Phases During Deposition of NixTi1-x Thin Film on Si Substrate - Interpretation of Experimental Results Using Molecular Dynamics Simulations

  1. TMS
  1. S. Aich1,
  2. B. Geetha Priyadarshini1,
  3. M. Gupta1,
  4. S. Ghosh1 and
  5. M. Chakraborty1,2

Published Online: 18 MAY 2012

DOI: 10.1002/9781118356074.ch81

Supplemental Proceedings: Materials Processing and Interfaces, Volume 1

Supplemental Proceedings: Materials Processing and Interfaces, Volume 1

How to Cite

Aich, S., Priyadarshini, B. G., Gupta, M., Ghosh, S. and Chakraborty, M. (2012) Formation of Crystalline and Amorphous Phases During Deposition of NixTi1-x Thin Film on Si Substrate - Interpretation of Experimental Results Using Molecular Dynamics Simulations, in Supplemental Proceedings: Materials Processing and Interfaces, Volume 1 (ed TMS), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118356074.ch81

Author Information

  1. 1

    Department of Metallurgical and Materials Engineering, Indian Institute of Technology, Kharagpur 721 302, India

  2. 2

    School of Mechanical Sciences, Indian Institute of Technology, Bhubaneswar 751 013, Orissa, India

Publication History

  1. Published Online: 18 MAY 2012
  2. Published Print: 17 MAR 2012

ISBN Information

Print ISBN: 9781118296073

Online ISBN: 9781118356074

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Keywords:

  • Magnetron Sputtering;
  • Crystallinity;
  • Thin film;
  • Texture;
  • Microscopy;
  • Amorphous

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental

  • Classical Molecular Dynamics Simulations

  • Results and Discussion

  • Conclusions