The Post-Annealing Effects of N-Doped ZnO Films Deposited by the Atomic Layer Deposition

  1. TMS
  1. Kwang Seok Jeong1,
  2. Yu Mi Kim1,
  3. Ho Jin Yun1,
  4. Seung Dong Yang1,
  5. Sang Youl Lee1,
  6. Young Su Kim2,
  7. Hi Deok Lee1 and
  8. Ga Won Lee1

Published Online: 7 JUN 2012

DOI: 10.1002/9781118357002.ch14

Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2

Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2

How to Cite

Jeong, K. S., Kim, Y. M., Yun, H. J., Yang, S. D., Lee, S. Y., Kim, Y. S., Lee, H. D. and Lee, G. W. (2012) The Post-Annealing Effects of N-Doped ZnO Films Deposited by the Atomic Layer Deposition, in Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2 (ed TMS), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118357002.ch14

Author Information

  1. 1

    Department of Electronics Engineering, Chungnam National University, Daejeon, Korea

  2. 2

    National Nanofab Center, Eoeun-dong, Yusong-gu, Daejeon, 305-806, Korea

Publication History

  1. Published Online: 7 JUN 2012
  2. Published Print: 17 MAR 2012

ISBN Information

Print ISBN: 9781118296097

Online ISBN: 9781118357002

SEARCH

Options for accessing this content:

  • If you are a society or association member and require assistance with obtaining online access instructions please contact our Journal Customer Services team.
    http://wiley.force.com/Interface/ContactJournalCustomerServices_V2.
  • Login via other institutional login options http://onlinelibrary.wiley.com/login-options.
  • You can purchase online access to this Chapter for a 24-hour period (price varies by title)
    • If you already have a Wiley Online Library or Wiley InterScience user account: login above and proceed to purchase the article.
    • New Users: Please register, then proceed to purchase the article.

Login via OpenAthens

or

Search for your institution's name below to login via Shibboleth.

Please register to:

  • Save publications, articles and searches
  • Get email alerts
  • Get all the benefits mentioned below!

Register now >