Investigation of the Crystal Structure on the Nanomechanical Properties of Pulsed Laser Deposited NbN Thin Films

  1. TMS
  1. M. A. Mamun1,3,
  2. A. H. Farha2,3,
  3. Y. Ufuktepe4,
  4. H. E. Elsayed-Ali2,3 and
  5. A. A. Elmustafa1,3

Published Online: 7 JUN 2012

DOI: 10.1002/9781118357002.ch89

Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2

Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2

How to Cite

Mamun, M. A., Farha, A. H., Ufuktepe, Y., Elsayed-Ali, H. E. and Elmustafa, A. A. (2012) Investigation of the Crystal Structure on the Nanomechanical Properties of Pulsed Laser Deposited NbN Thin Films, in Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2 (ed TMS), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118357002.ch89

Author Information

  1. 1

    Department of Mechanical Engineering, Old Dominion University, Norfolk, Virginia 23529, USA

  2. 2

    Department of Electrical and Computer Engineering, Old Dominion University, Norfolk, Virginia 23529, USA

  3. 3

    Applied Research Center, Jefferson National Accelerator Facility, Newport News, Virginia, 23606, USA

  4. 4

    Department of Physics, Cukurova University, Adana, 01330, TURKEY

Publication History

  1. Published Online: 7 JUN 2012
  2. Published Print: 17 MAR 2012

ISBN Information

Print ISBN: 9781118296097

Online ISBN: 9781118357002

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Keywords:

  • NbN;
  • PLD;
  • Nanoindentation;
  • Hardness;
  • Modulus;
  • Nanomechanical properties;
  • XRD;
  • AFM;
  • SEM;
  • EPMA;
  • Crystal structure

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental

  • Results and Discussions

  • Conclusion