Nanomechanical Properties of Hydrogen Implanted AlN for Layer Transfer by Ion-Induced Splitting
Published Online: 7 JUN 2012
Copyright © 2012 The Minerals, Metals, & Materials Society. All rights reserved.
Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2
How to Cite
Mamun, M. A., Tapily, K., Moutanabbir, O., Gu, D., Baumgart, H. and Elmustafa, A. A. (2012) Nanomechanical Properties of Hydrogen Implanted AlN for Layer Transfer by Ion-Induced Splitting, in Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2 (ed TMS), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118357002.ch90
- Published Online: 7 JUN 2012
- Published Print: 17 MAR 2012
Print ISBN: 9781118296097
Online ISBN: 9781118357002
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