Nanomechanical Properties of Hydrogen Implanted AlN for Layer Transfer by Ion-Induced Splitting

  1. TMS
  1. M. A. Mamun1,3,
  2. K. Tapily2,3,
  3. O. Moutanabbir4,
  4. D. Gu2,3,
  5. H. Baumgart2,3 and
  6. A. A Elmustafa1,3

Published Online: 7 JUN 2012

DOI: 10.1002/9781118357002.ch90

Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2

Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2

How to Cite

Mamun, M. A., Tapily, K., Moutanabbir, O., Gu, D., Baumgart, H. and Elmustafa, A. A. (2012) Nanomechanical Properties of Hydrogen Implanted AlN for Layer Transfer by Ion-Induced Splitting, in Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2 (ed TMS), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118357002.ch90

Author Information

  1. 1

    Department of Mechanical and Aerospace Engineering, Old Dominion University, Norfolk, Virginia 23529, USA

  2. 2

    Department of Electrical and Computer Engineering, Old Dominion University, Norfolk, Virginia, 23529, USA

  3. 3

    Applied Research Center, Jefferson National Accelerator Facility, Newport News, Virginia, 23606, USA

  4. 4

    Max-Plank Institute of Microstructure Physics, Halle, Germany

Publication History

  1. Published Online: 7 JUN 2012
  2. Published Print: 17 MAR 2012

ISBN Information

Print ISBN: 9781118296097

Online ISBN: 9781118357002

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Keywords:

  • AIN;
  • Hydrogen-fluence;
  • Hydrogen implantation;
  • Nanoindentation;
  • Hardness;
  • Modulus;
  • AFM;
  • TEM;
  • Crystal structure

Summary

This chapter contains sections titled:

  • Introduction

  • Experiment

  • Results and Discussions

  • Conclusion