Nanomechanical Properties of Atomic Layer Deposition Sb2Te3 Thin Films

  1. TMS
  1. M. A. Mamun1,3,
  2. D. Gu2,3,
  3. D. Nminibapiel2,3,
  4. H. Baumeart2,3,
  5. H. Robinson4,
  6. V. Kochergin5 and
  7. A. A. Elmustafa1,3

Published Online: 7 JUN 2012

DOI: 10.1002/9781118357002.ch91

Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2

Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2

How to Cite

Mamun, M. A., Gu, D., Nminibapiel, D., Baumeart, H., Robinson, H., Kochergin, V. and Elmustafa, A. A. (2012) Nanomechanical Properties of Atomic Layer Deposition Sb2Te3 Thin Films, in Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2 (ed TMS), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118357002.ch91

Author Information

  1. 1

    Department of Mechanical and Aerospace Engineering, Old Dominion University, Norfolk, Virginia 23529, USA

  2. 2

    Department of Electrical and Computer Engineering, Old Dominion University, Norfolk, Virginia, 23529, USA

  3. 3

    Applied Research Center, Jefferson National Accelerator Facility, Newport News, Virginia, 23606, USA

  4. 4

    Department of Physics, Virginia Tech, Blacksburg, Virginia 24060, USA

  5. 5

    MicroXact Inc., 2000 Kraft Dr., Suite 1207, Blacksburg, VA 24060, USA

Publication History

  1. Published Online: 7 JUN 2012
  2. Published Print: 17 MAR 2012

ISBN Information

Print ISBN: 9781118296097

Online ISBN: 9781118357002

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Keywords:

  • Sb2Te3;
  • ALD;
  • Nanoindentation;
  • Hardness;
  • Modulus;
  • XRD;
  • AFM;
  • FE-SEM;
  • EDS;
  • Crystal structure

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental

  • Results and Discussions

  • Conclusion