Nanoindentation Investigation of VO2 Films Synthesized by Reactive Bias Target Ion Beam Deposition (RBTIBD)

  1. TMS
  1. M. A. Mamun1,3,
  2. S. Kittiwatanakul4,
  3. K. Zhang2,3,
  4. H. Baumgart2,3,
  5. Jiwei Lu4,
  6. S. Wolf4 and
  7. A. A. Elmustafa1,3

Published Online: 7 JUN 2012

DOI: 10.1002/9781118357002.ch94

Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2

Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2

How to Cite

Mamun, M. A., Kittiwatanakul, S., Zhang, K., Baumgart, H., Lu, J., Wolf, S. and Elmustafa, A. A. (2012) Nanoindentation Investigation of VO2 Films Synthesized by Reactive Bias Target Ion Beam Deposition (RBTIBD), in Supplemental Proceedings: Materials Properties, Characterization, and Modeling, Volume 2 (ed TMS), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118357002.ch94

Author Information

  1. 1

    Department of Mechanical and Aerospace Engineering, Old Dominion University, Norfolk, Virginia 23529, USA

  2. 2

    Department of Electrical and Computer Engineering, Old Dominion University, Norfolk, Virginia, 23529, USA

  3. 3

    Applied Research Center, Jefferson National Accelerator Facility, Newport News, Virginia, 23606, USA

  4. 4

    Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904-4745, USA

Publication History

  1. Published Online: 7 JUN 2012
  2. Published Print: 17 MAR 2012

ISBN Information

Print ISBN: 9781118296097

Online ISBN: 9781118357002

SEARCH

Keywords:

  • VO2;
  • Ion beam deposition;
  • Nanoindentation;
  • Hardness;
  • Modulus;
  • TEM;
  • XRD;
  • AFM;
  • FE-SEM;
  • Crystal structure

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental

  • Results and Discussions

  • Conclusion

  • Acknowledgements