Chemical-Solution Deposition of Hafnia Films on Self-Assembled Molecular Monolayers: Part D - Precipitation Behavior in Bulk Solutions

  1. Richard M. Laine,
  2. Michael Hu and
  3. Songwei Lu
  1. Michael Z. Hu1,
  2. Gerold E. Jellison1,
  3. Amy C. DeBaillie2 and
  4. Yayi Wei3

Published Online: 25 APR 2012

DOI: 10.1002/9781118408049.ch6

Ceramic Nanomaterials and Nanotechnologies IV, Volume 172

Ceramic Nanomaterials and Nanotechnologies IV, Volume 172

How to Cite

Hu, M. Z., Jellison, G. E., DeBaillie, A. C. and Wei, Y. (2006) Chemical-Solution Deposition of Hafnia Films on Self-Assembled Molecular Monolayers: Part D - Precipitation Behavior in Bulk Solutions, in Ceramic Nanomaterials and Nanotechnologies IV, Volume 172 (eds R. M. Laine, M. Hu and S. Lu), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118408049.ch6

Author Information

  1. 1

    Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6181.

  2. 2

    Current address: University of North Carolina at Chapel Hill, Chapel Hill, NC 27599.

  3. 3

    Current address: Infineon Technologies, Hopewell Junction, NY 12533

Publication History

  1. Published Online: 25 APR 2012
  2. Published Print: 1 MAR 2006

ISBN Information

Print ISBN: 9781574982428

Online ISBN: 9781118408049

SEARCH

Keywords:

  • chemical-solution deposition;
  • scanning electron microscopy;
  • film formation process;
  • growth kinetics;
  • X-ray scattering techniques

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental Methods

  • Results

  • Discussion

  • Summary

  • Acknowledgments