2. Plasmas for Surface Modification

  1. Rory A. Wolf

Published Online: 13 NOV 2012

DOI: 10.1002/9781118547519.ch2

Atmospheric Pressure Plasma for Surface Modification

Atmospheric Pressure Plasma for Surface Modification

How to Cite

Wolf, R. A. (2012) Plasmas for Surface Modification, in Atmospheric Pressure Plasma for Surface Modification, John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118547519.ch2

Publication History

  1. Published Online: 13 NOV 2012
  2. Published Print: 29 OCT 2012

ISBN Information

Print ISBN: 9781118016237

Online ISBN: 9781118547519

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Keywords:

  • surface modification;
  • low-pressure plasmas;
  • surface etching;
  • physical vapor deposition systems;
  • ion plating process

Summary

This chapter contains sections titled:

  • Low-Pressure Plasmas

  • Microwave Systems

  • Physical Vapor Deposition Systems

  • Atmospheric Plasma Systems

  • Atmospheric Plasma Precursor Deposition Systems