7. Vapor Deposition of Fluoropolymer Surfaces

  1. Dennis W. Smith Jr. Dr.2,
  2. Scott T. Iacono Dr.3 and
  3. Suresh S. Iyer Dr.4
  1. Jose L. Yagüe and
  2. Karen K. Gleason

Published Online: 2 MAY 2014

DOI: 10.1002/9781118850220.ch7

Handbook of Fluoropolymer Science and Technology

Handbook of Fluoropolymer Science and Technology

How to Cite

Yagüe, J. L. and Gleason, K. K. (2014) Vapor Deposition of Fluoropolymer Surfaces, in Handbook of Fluoropolymer Science and Technology (eds D. W. Smith, S. T. Iacono and S. S. Iyer), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9781118850220.ch7

Editor Information

  1. 2

    Department of Chemistry, University of Texas at Dallas, Richardson, TX

  2. 3

    Department of Chemistry, Chemistry Research Center, United States Air Force Academy, Colorado Springs, CO

  3. 4

    3M Corporate R&D, St. Paul, MN

Author Information

  1. Massachusetts Institute of Technology

Publication History

  1. Published Online: 2 MAY 2014
  2. Published Print: 30 MAY 2014

ISBN Information

Print ISBN: 9780470079935

Online ISBN: 9781118850220



  • chemical vapor deposition (CVD);
  • copolymers;
  • fluoropolymer;
  • p(PFDA);
  • polymerization;
  • polytetrafluoroethylene (PTFE);
  • Polyvinylidene fluoride (PVDF)


Chemical vapor deposition (CVD) polymerization methods result in a versatile platform for the fabrication of high quality fluoropolymer films. This chapter provides an insight into the mechanism of formation of these films, the ability to tailor their properties by tuning the experimental conditions and the chemistry associated with the multiple functionalities available. It describes the examples of iCVD fluoropolymer reactants such as polytetrafluoroethylene (PTFE), Polyvinylidene fluoride (PVDF), poly(1H,1H,2H,2H-perfluorodecyl acrylate p(PFDA) and its copolymers and example process conditions. The chapter summarizes various subtypes of CVD polymerization processes. The scale-up of CVD methods and the possibility to integrate them with vacuum processes currently used in the manufacturing industry permit to benefit from all the advantages of the fluorinated films in their commercialization. Continuous investigation in these materials has led to new applications in many different fields, such as optoelectronic, biomedicine or membrane separation systems, making a big impact in polymer thin-film technology.