11. Electrical Breakdown in Advanced Interconnect Dielectrics

  1. Mikhail R. Baklanov3,
  2. Paul S. Ho4 and
  3. Ehrenfried Zschech5
  1. Ennis T. Ogawa1 and
  2. Oliver Aubel2

Published Online: 17 FEB 2012

DOI: 10.1002/9781119963677.ch11

Advanced Interconnects for ULSI Technology

Advanced Interconnects for ULSI Technology

How to Cite

Ogawa, E. T. and Aubel, O. (2012) Electrical Breakdown in Advanced Interconnect Dielectrics, in Advanced Interconnects for ULSI Technology (eds M. R. Baklanov, P. S. Ho and E. Zschech), John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/9781119963677.ch11

Editor Information

  1. 3

    IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

  2. 4

    Lab for Interconnect and Packaging, The University of Texas at Austin, UT-PRC 10100 Burnet Road, Bldg 160, Mail Code R8650, Austin, TX 78758, USA

  3. 5

    Fraunhofer Institute for Non-Destructive Testing IZFP, Dresden Branch, Maria-Reiche-Strasse 2, 01109 Dresden, Germany

Author Information

  1. 1

    Broadcom Corporation, Irvine, CA 92617, USA

  2. 2

    GLOBALFOUNDRIES, Dresden Module One LLC & Co. KG, Wilschdorfer Landstrasse 101, 01109 Dresden, Germany

Publication History

  1. Published Online: 17 FEB 2012
  2. Published Print: 24 FEB 2012

ISBN Information

Print ISBN: 9780470662540

Online ISBN: 9781119963677

SEARCH

Options for accessing this content:

  • If you have access to this content through a society membership, please first log in to your society website.
  • Login via other institutional login options http://onlinelibrary.wiley.com/login-options.
  • You can purchase online access to this Chapter for a 24-hour period (price varies by title)
    • If you already have a Wiley Online Library or Wiley InterScience user account: login above and proceed to purchase the article.
    • New Users: Please register, then proceed to purchase the article.

Type your institution's name in the box below. If your institution is a Wiley customer, it will appear in the list of suggested institutions and you will be able to log in to access content. Some users may also log in directly via OpenAthens.

Please note that there are currently a number of duplicate entries in the list of institutions. We are actively working on fixing this issue and apologize for any inconvenience caused.

Please register to:

  • Save publications, articles and searches
  • Get email alerts
  • Get all the benefits mentioned below!

Register now >