3. Development of STEM

  1. Rik Brydson
  1. L. M. Brown

Published Online: 26 JUL 2011

DOI: 10.1002/9781119978848.ch3

Aberration-Corrected Analytical Transmission Electron Microscopy

Aberration-Corrected Analytical Transmission Electron Microscopy

How to Cite

Brown, L. M. (2011) Development of STEM, in Aberration-Corrected Analytical Transmission Electron Microscopy (ed R. Brydson), John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/9781119978848.ch3

Editor Information

  1. Leeds Electron Microscopy and Spectroscopy (LEMAS) Centre, Institute for Materials Research, SPEME, University of Leeds, Leeds, UK

Author Information

  1. Robinson College, Cambridge and Cavendish Laboratory, Cambridge, UK

Publication History

  1. Published Online: 26 JUL 2011
  2. Published Print: 16 SEP 2011

Book Series:

  1. RMS-Wiley Imprint

Book Series Editors:

  1. Susan Brooks

ISBN Information

Print ISBN: 9780470518519

Online ISBN: 9781119978848



  • STEM development - of scanning transmission electron microscopy;
  • field of nanotechnology - occupying domain, from atomic size to about 100 nm;
  • Crewe revolution, STEM - solving information problem, ‘annular dark field detector’ or ‘ADF’;
  • scattering into ADF - from Rutherford scattering, by atomic nuclei sampled by beam;
  • basic configuration of Crewe's instrument - in all modern dedicated STEM;
  • electron optical simplicity of STEM - kind of ‘radar’ beam, scanning regions of interest;
  • single-lens conventional microscope (CTEM) - and single-lens scanning transmission microscope (STEM);
  • STEM, collection of CBED patterns, probe position - diffractive imaging, ‘Ptychography’;
  • EELS, analysis at the highest possible spatial resolution - limited, by probe size and ‘impact parameter’;
  • beam damage and beam writing - limitations of STEM, specimen damage by fast electron beam


This chapter contains sections titled:

  • Introduction: Structural and Analytical Information in Electron Microscopy

  • The Crewe Revolution: How STEM Solves the Information Problem

  • Electron Optical Simplicity of STEM

  • The Signal Freedom of STEM

  • Beam Damage and Beam Writing

  • Correction of Spherical Aberration

  • What does the Future Hold?

  • References