6. Details of STEM

  1. Rik Brydson
  1. Alan Craven

Published Online: 26 JUL 2011

DOI: 10.1002/9781119978848.ch6

Aberration-Corrected Analytical Transmission Electron Microscopy

Aberration-Corrected Analytical Transmission Electron Microscopy

How to Cite

Craven, A. (2011) Details of STEM, in Aberration-Corrected Analytical Transmission Electron Microscopy (ed R. Brydson), John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/9781119978848.ch6

Editor Information

  1. Leeds Electron Microscopy and Spectroscopy (LEMAS) Centre, Institute for Materials Research, SPEME, University of Leeds, Leeds, UK

Author Information

  1. Department of Physics and Astronomy, University of Glasgow, Glasgow, Scotland, UK

Publication History

  1. Published Online: 26 JUL 2011
  2. Published Print: 16 SEP 2011

Book Series:

  1. RMS-Wiley Imprint

Book Series Editors:

  1. Susan Brooks

ISBN Information

Print ISBN: 9780470518519

Online ISBN: 9781119978848

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Keywords:

  • STEM, and other elements of STEM optical column - best use of corrected objective lens;
  • probe size, probe current and probe angle relationship;
  • chromatic aberration effect - dominant, both Cc and ΔE minimised;
  • effect of small change in αopt - on intensity distribution in probe;
  • effect of α on diffraction pattern - α, reduced below value of αopt;
  • condenser system - and condenser optics, necessary finesse in control of α;
  • scanning system - and principles of scanning system;
  • drift, drift correction and smart acquisition – drift and image distortion;
  • beam blanking - two basic uses of beam blanking in STEM;
  • imaging using transmitted electrons - diffraction pattern, and any signal image specimen

Summary

This chapter contains sections titled:

  • Signal to Noise Ratio and Some of its Implications

  • The Relationships Between Probe Size, Probe Current and Probe Angle

  • The Condenser System

  • The Scanning System

  • The Specimen Stage

  • Post-Specimen Optics

  • Beam Blanking

  • Detectors

  • Imaging Using Transmitted Electrons

  • Signal Acquisition

  • Acknowledgements

  • References