Chapter 1. Silicon Processing

  1. Prof. Kenneth A. Jackson
  1. John G. Wilkes

Published Online: 21 DEC 2007

DOI: 10.1002/9783527611805.ch1

Silicon Devices: Structures and Processing

Silicon Devices: Structures and Processing

How to Cite

Wilkes, J. G. (1998) Silicon Processing, in Silicon Devices: Structures and Processing (ed K. A. Jackson), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527611805.ch1

Editor Information

  1. The University of Arizona, Arizona Materials Laboratory, 4715 E., Fort Lowell Road, Tucson, AZ 85712, USA

Author Information

  1. Formerly with Philips Components Ltd., Southampton, U.K.

Publication History

  1. Published Online: 21 DEC 2007
  2. Published Print: 15 OCT 1998

ISBN Information

Print ISBN: 9783527295951

Online ISBN: 9783527611805

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