Chapter 3. Silicon Device Processing
- Prof. Kenneth A. Jackson
Published Online: 21 DEC 2007
Copyright © 1998 WILEY-VCH Verlag GmbH
Silicon Devices: Structures and Processing
How to Cite
Kwong, D.-L. (1998) Silicon Device Processing, in Silicon Devices: Structures and Processing (ed K. A. Jackson), Wiley-VCH Verlag GmbH, Weinheim, Germany. doi: 10.1002/9783527611805.ch3
The University of Arizona, Arizona Materials Laboratory, 4715 E., Fort Lowell Road, Tucson, AZ 85712, USA
- Published Online: 21 DEC 2007
- Published Print: 15 OCT 1998
Print ISBN: 9783527295951
Online ISBN: 9783527611805
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